JPH0562827B2 - - Google Patents

Info

Publication number
JPH0562827B2
JPH0562827B2 JP60048837A JP4883785A JPH0562827B2 JP H0562827 B2 JPH0562827 B2 JP H0562827B2 JP 60048837 A JP60048837 A JP 60048837A JP 4883785 A JP4883785 A JP 4883785A JP H0562827 B2 JPH0562827 B2 JP H0562827B2
Authority
JP
Japan
Prior art keywords
silicon substrate
view
tactile sensor
sectional
pedestal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60048837A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61208273A (ja
Inventor
Kohei Higuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP60048837A priority Critical patent/JPS61208273A/ja
Publication of JPS61208273A publication Critical patent/JPS61208273A/ja
Publication of JPH0562827B2 publication Critical patent/JPH0562827B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Pressure Sensors (AREA)
JP60048837A 1985-03-12 1985-03-12 触覚センサ Granted JPS61208273A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60048837A JPS61208273A (ja) 1985-03-12 1985-03-12 触覚センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60048837A JPS61208273A (ja) 1985-03-12 1985-03-12 触覚センサ

Publications (2)

Publication Number Publication Date
JPS61208273A JPS61208273A (ja) 1986-09-16
JPH0562827B2 true JPH0562827B2 (en]) 1993-09-09

Family

ID=12814355

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60048837A Granted JPS61208273A (ja) 1985-03-12 1985-03-12 触覚センサ

Country Status (1)

Country Link
JP (1) JPS61208273A (en])

Also Published As

Publication number Publication date
JPS61208273A (ja) 1986-09-16

Similar Documents

Publication Publication Date Title
US5489900A (en) Force sensitive transducer for use in a computer keyboard
US5055838A (en) Silicon tactile imaging array and method of making same
JPH0577304B2 (en])
US7040182B2 (en) Stress sensor
JP2822486B2 (ja) 感歪センサおよびその製造方法
JPH0562827B2 (en])
US6308575B1 (en) Manufacturing method for the miniaturization of silicon bulk-machined pressure sensors
JPH0562828B2 (en])
JPH0562829B2 (en])
JPS63113326A (ja) 触覚センサ
JPS61224465A (ja) 力センサ及びその製造方法
JPS61172378A (ja) 圧力センサ
JPS63214631A (ja) 圧覚センサ
JPS6394690A (ja) 力検出装置
JPH01236659A (ja) 半導体圧力センサ
JPH01201103A (ja) 接触検出装置
JPS629243A (ja) 半導体触覚センサ
JPS61177783A (ja) 半導体圧力センサ
JPS63226073A (ja) 力検出装置
JPH0554053B2 (en])
KR100248194B1 (ko) 압저항형 압력센서 및 그 제조방법
JPS61181930A (ja) 圧覚センサ
JPS61277027A (ja) タツチセンサ
CN110207864A (zh) 敏感膜和传力导杆一体化的微力传感器及其加工方法
JPH04323566A (ja) 半導体加速度センサ